Vacuum is a scientific journal specializing in vacuum science and technology, plasma science, surface engineering, and materials science under controlled low-pressure environments. It covers topics such as vacuum pumping, instrumentation, gas-surface interactions, and thin film deposition.
Condensed Matter PhysicsInstrumentationSurfaces, Coatings and Films
Research Topics (OpenAlex)
Metal and Thin Film MechanicsPlasma Diagnostics and ApplicationsSemiconductor materials and devicesIon-surface interactions and analysisElectron and X-Ray Spectroscopy TechniquesDiamond and Carbon-based Materials ResearchScientific Measurement and Uncertainty EvaluationVacuum and Plasma ArcsZnO doping and propertiesCopper Interconnects and Reliability