This journal focuses on the science and technology of vacuum and surface phenomena, with applications in materials science, semiconductor manufacturing, and device fabrication. Recent articles explore advanced materials processing, including plasma etching, thin film deposition, and surface modification for applications such as batteries, transistors, and sensors. The journal also covers the development and characterization of novel electron and ion sources, as well as advanced imaging and analysis techniques for nanoscale structures.
Condensed Matter PhysicsProcess Chemistry and TechnologyElectrical and Electronic EngineeringInstrumentationSurfaces, Coatings and FilmsElectronic, Optical and Magnetic MaterialsMaterials Chemistry
Research Topics (OpenAlex)
Semiconductor materials and devicesAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure AnalysisGaN-based semiconductor devices and materialsNanofabrication and Lithography TechniquesZnO doping and propertiesIon-surface interactions and analysisNanowire Synthesis and ApplicationsSemiconductor Quantum Structures and DevicesAdvancements in Semiconductor Devices and Circuit Design