HomeSearchJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

AVS Science and Technology Society · United States

ISSN0734-2101eISSN1520-8559
SJR Q2WOS SCIEScopus / SJR
53
/ 100
Medium Risk
Score Breakdown
WoS SCIE/SSCI+25
Scopus Q2+18
Total53
Journal Impact Factor
This journal is indexed in Web of Science (JCR) and has an official Journal Impact Factor. View on Clarivate Master Journal List ↗
SJR Score
0.473
H-Index
176
SNIP
0.768
Total Works
18,000
Total Citations
396,345
2yr Mean Citedness
2.10
Free JIF alternative

Aims & Scope✦ Inferred from recent articles

This journal focuses on the science and technology of surfaces, thin films, and vacuum processes. It covers research on material deposition techniques, surface characterization, and the properties of thin films and coatings. Topics include the development and application of various materials, such as semiconductors, oxides, and metals, for electronic, optical, and catalytic devices.

AI-summarised from recent articles · verify on the publisher page

⚡ Speed vs Prestige
How does this journal balance review speed with impact level?
Q2
SJR Rank
Top 50% in field

General Information

Country / RegionUnited States
Primary LanguageEnglish
1st Year Published
Annual Volume~ 329 articles / year
StatusActive
Total Publications18,000
Publisher OrgAmerican Institute of Physics

Submission Info

Publishing ModelSubscription
Peer Review
Review Time
Acceptance Rate
OA License
OA Rate

Ethics & Quality

COPE Member✗ No
OASPA Member✗ No
Not on Predatory Lists✓ Yes

Think.Check.Submit Compliance

5/12 · 42%
Do you know the journal / publisher?
AVS Science and Technology Society
Does the journal have a website?
No URL
Is the ISSN verified?
0734-2101 / 1520-8559
Indexed in a trusted database?
WoS, Scopus
Peer review process documented?
N/A
Follows ethical publishing standards (COPE)?
N/A
APC fees clearly disclosed?
N/A
Not on predatory/blacklists?
✓ Clean
Long-term digital preservation?
N/A
Plagiarism detection in place?
N/A
Listed in DOAJ (verified OA)?
N/A
Primary language documented?
English

Based on the Think.Check.Submit framework by DOAJ, COPE & OASPA. All data from verified open sources.

Publication & Citation Trend

Articles published
Times cited
2019
2020
2021
2022
2023
2024
2025
2026

Source: OpenAlex · Note: citations accumulate over time so older years appear higher

SJR Quartile by Discipline

Scimago ranks this journal separately in each subject category — its quartile can differ by discipline.

Condensed Matter PhysicsQ2
Surfaces, Coatings and FilmsQ2
Surfaces and InterfacesQ3

Subject Classification

Web of Science Categories

Materials Science, Coatings & FilmsPhysics, Applied

Scopus Categories

Condensed Matter PhysicsSurfaces and InterfacesSurfaces, Coatings and Films

Research Topics (OpenAlex)

Semiconductor materials and devicesMetal and Thin Film MechanicsPlasma Diagnostics and ApplicationsIon-surface interactions and analysisDiamond and Carbon-based Materials ResearchElectron and X-Ray Spectroscopy TechniquesCopper Interconnects and ReliabilityZnO doping and propertiesSurface and Thin Film PhenomenaElectronic and Structural Properties of Oxides
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Data updated: 2026-05-22 · Sources: SJR, DOAJ, OpenAlex, WoS, Crossref