This journal focuses on the scientific and technological aspects of semiconductor manufacturing. It covers topics such as process modeling, defect analysis, materials science, equipment monitoring, and yield optimization. The scope includes advanced techniques like machine learning, computational fluid dynamics, and novel metrology methods applied to semiconductor fabrication processes and integrated circuits.
Industrial and Manufacturing EngineeringCondensed Matter PhysicsElectrical and Electronic EngineeringElectronic, Optical and Magnetic Materials
Research Topics (OpenAlex)
Industrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and devicesManufacturing Process and OptimizationAdvancements in Photolithography Techniques