Home›Search›JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS · US · Est. 2002

ISSN1932-5150eISSN2708-8340

✓ WOS SCIE

/ 100

High Risk

Score Breakdown

✓ WoS SCIE/SSCI+25

Total25

Journal Impact Factor

This journal is indexed in Web of Science (JCR) and has an official Journal Impact Factor. View on Clarivate Master Journal List ↗

H-Index

Total Works

1,675

Total Citations

17,486

2yr Mean Citedness

0.00

Free JIF alternative

Aims & Scope✦ Inferred from recent articles

The JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 focuses on core enabling technologies for the electronics industry, particularly in the area of micro- and nanopatterning. Recent articles address advanced lithography techniques like extreme ultraviolet (EUV) lithography, including illumination strategies, mask absorber materials, and spectral purity. The journal also covers metrology for characterizing nanoscale features, such as line edge roughness (LER) and sidewall roughness (SWR), using techniques like scanning electron microscopy (SEM) and atomic force microscopy (AFM). Additionally, it explores materials and fabrication methods for microfluidics and microelectromechanical systems (MEMS), as well as defect detection and analysis in semiconductor manufacturing.

AI-summarised from recent articles · verify on the publisher page

General Information

Country / RegionUS

Primary LanguageEnglish

1st Year Published2002

Status⚠️ Inactive

Total Publications1,675

Publisher OrgSPIE

Submission Info

Peer Review—

Review Time—

Acceptance Rate—

OA License—

OA Rate—

Ethics & Quality

COPE Member✗ No

OASPA Member✗ No

Not on Predatory Lists✓ Yes

Think.Check.Submit Compliance

thinkchecksubmit.org

5/12 · 42%

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Do you know the journal / publisher?

SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS

❌

Does the journal have a website?

No URL

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Is the ISSN verified?

1932-5150 / 2708-8340

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Indexed in a trusted database?

WoS

❌

Peer review process documented?

N/A

❌

Follows ethical publishing standards (COPE)?

N/A

❌

APC fees clearly disclosed?

N/A

✅

Not on predatory/blacklists?

✓ Clean

❌

Long-term digital preservation?

N/A

❌

Plagiarism detection in place?

N/A

❌

Listed in DOAJ (verified OA)?

N/A

✅

Primary language documented?

English

Based on the Think.Check.Submit framework by DOAJ, COPE & OASPA. All data from verified open sources.

Subject Classification

Web of Science Categories

Engineering, Electrical & ElectronicMaterials Science, MultidisciplinaryNanoscience & NanotechnologyOptics

Research Topics (OpenAlex)

Advancements in Photolithography TechniquesNanofabrication and Lithography TechniquesIntegrated Circuits and Semiconductor Failure AnalysisOptical Coatings and GratingsElectron and X-Ray Spectroscopy TechniquesAdvanced MEMS and NEMS TechnologiesAdvanced Surface Polishing TechniquesPhotonic and Optical DevicesMechanical and Optical ResonatorsForce Microscopy Techniques and Applications